A 1-D Capacitive Micromachined Ultrasonic Transducer Imaging Array Fabricated With a Silicon-Nitride-Based Fusion Process
Bibliographic record
Abstract
Capacitive micromachined ultrasonic transducers (CMUTs) are an alternative to the conventional method of generating ultrasound that increases bandwidths, simplifies fabrication, and facilitates the integration with necessary electronics. We report the fabrication, characterization, and initial-phased array imaging results of a 64-element array CMUT fabricated using a fusion bonding process where both the membrane and insulation layers are user deposited silicon nitride. Individual cells have a diameter of 25 μm and a membrane thickness of 500 nm. The center frequency in immersion is 6.6 MHz with a -6 dB fractional bandwidth of 123%. A 90° phased array sector scan is made of a four-wire target using a 32-element subset of the array. Pressures in excess of 2 MPa are measured. An axial resolution of 130 μm and a lateral resolution of 0.03 rad are obtained from a wire target 15 mm away from the transducer.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".