Development of a humidity microsensor with thermal reset
Bibliographic record
Abstract
The present project is aimed at developing a capacitive humidity microsensor to measure humidity profiles inside the human respiratory tract. The ultimate goal of the project is to design the sensor with minimum size and with maximum sensitivity providing minimum response time. The sensor will allow determination of humidity variation in different generations of the human lung during a breath. The design process involves an appropriate simulation of the sensor to investigate the influence of several parameters on its sensitivity, and to develop a microheater that would be used to thermally reset the sensor. This sensor consists of interdigitated electrodes formed as a capacitor using aluminum as conductor and polyimide as dielectric built on a silicon substrate. For the thermal resetting, a polysilicon microheater will be built just underneath the sensor. The system should have quick absorption of moisture and ideally have a response time of less than 1 s. This specific requirement would allow for several measurements during one breath period. In order to meet these constraints a capacitive sensor was designed with a dielectric sensitive to humidity. Other parameters such as shapes of air contact surfaces, domain dimensions, properties of materials, etc. are analyzed and results are shown as well.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".