Low-loss inductors built on PECVD intrinsic amorphous silicon for RF integrated circuits
Bibliographic record
Abstract
The quality factor (Q) of inductors on silicon (Si) is limited by the series resistance of the metal at low frequency and by the substrate resistivity at high frequency. Oxide is generally used to isolate the useful signal of the inductor from the lossy substrate. However, stoichiometric silica (SiO2) is processed at a high temperature, which eliminates the possibility of post-CMOS integration. By contrast, plasma enhanced chemical vapour deposition (PECVD) amorphous Si can be deposited at a low temperature and is easily integrated with most Si-based processes. Intrinsic amorphous hydrogenated silicon (i-a-Si:H) also displays low conductivity. In this work, i-a-Si:H deposited at a low temperature (250'C) is used in a novel approach as the isolation material for planar inductors on Si for RF integrated circuits. An improvementof more than 50% in Q is measured when 1.5 µm i-a-Si:H film is deposited on the Si substrate prior to fabrication of the inductor. This result demonstrates the influence of i-a-Si:H film on the RF performance of an inductor. Intrinsic a-Si:H is shown to be a promising material for the isolation of RF devices on low-resistivity Si.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".