Low-loss inductors built on PECVD intrinsic amorphous silicon for RF integrated circuits
Why this work is in the frame
A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.
Bibliographic record
Abstract
The quality factor (Q) of inductors on silicon (Si) is limited by the series resistance of the metal at low frequency and by the substrate resistivity at high frequency. Oxide is generally used to isolate the useful signal of the inductor from the lossy substrate. However, stoichiometric silica (SiO2) is processed at a high temperature, which eliminates the possibility of post-CMOS integration. By contrast, plasma enhanced chemical vapour deposition (PECVD) amorphous Si can be deposited at a low temperature and is easily integrated with most Si-based processes. Intrinsic amorphous hydrogenated silicon (i-a-Si:H) also displays low conductivity. In this work, i-a-Si:H deposited at a low temperature (250'C) is used in a novel approach as the isolation material for planar inductors on Si for RF integrated circuits. An improvementof more than 50% in Q is measured when 1.5 µm i-a-Si:H film is deposited on the Si substrate prior to fabrication of the inductor. This result demonstrates the influence of i-a-Si:H film on the RF performance of an inductor. Intrinsic a-Si:H is shown to be a promising material for the isolation of RF devices on low-resistivity Si.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it