Correlation between Electrical and Optical Properties of Tantalum Anodic Oxide and Electron Cyclotron Resonance Etching Studies of E-Beam Deposited Ta<sub>2</sub>O<sub>5</sub>Films
Bibliographic record
Abstract
The anodic tantalum oxide films were grown in 5ml/98% H2SO4 electrolyte saturated with additional H2. Discharge currents were collected immediately after growth. The optical properties of these films were studied with an ellipsometer over a wide range of frequencies from the UV to the IR. It was established that films for which the discharge currents followed the known “~ -1” power dependence (specific for films that can sustain large electric fields in the MV/cm range) have different optical properties as compared to films for which the discharge current is not represented by that empirical function. Etching studies of e-beam deposited Ta2O5 films, combined with reflectance measurements after each etch step, resulted in a shift in the reflectance spectrum as a function of film thickness. This empirical f versus d dependence (where f is the frequency corresponding to the reflectance minimum for each film thickness, d) was used to calculate the energies of the 4d doublet of Ta in Ta2O5.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".