ECR CVD of silicon oxynitride films for antireflection coating of 10 Gbit/s, 1.56 μm multi-quantum well InP/InGaAsP Mach-Zehnder modulators
Bibliographic record
Abstract
This paper describes the development of electron cyclotron resonance (ECR) plasma-deposited SiO/sub x/N/sub y/ single layer anti-reflecting (AR) optical coatings for III-V 10 Gbit/s, 1.56 /spl mu/m Mach-Zehnder (MZ) modulators. To minimize the effect of reflections from the cleaved facets, MZ modulators require low reflectivity (1% for TE and TM polarizations) facet coatings, which remain stable over operating life (25 years). Several reports in the literature have addressed the problem of achieving a low reflectance facet coating by monitoring; the reflectance of, for example, one laser at a time. However, for production quantities, the uniformity, stability, run-to-run reproducibility and device performance across several bars held in a coating fixture must be optimized. This places constraints on the deposition method and fixturing. E-beam evaporated coatings tend to produce films which have poor stability (i.e. drift in reflectance); deposition at high substrate temperatures reduces this effect but can also result in incongruent loss of the group V element and give rise to absorption and/or scattering at the facet. In this paper we report of the fabrication and characterization of SiO/sub x/N/sub y/ films deposited by ECR CVD which provides low ion energy (/spl sim/<25 eV) bombardment, low plasma damage and low deposition temperature to produce high quality, stable AR facet coatings.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".