Pressure indicating film characterization of pressure distribution in eutectic Au/Sn wafer‐to‐wafer bonding
Bibliographic record
Abstract
Purpose The purpose of this paper is to characterize pressure non‐uniformity in a wafer‐to‐wafer bond chamber using pressure sensitive paper. Design/methodology/approach Pressure non‐uniformity in a wafer‐to‐wafer bond chamber is characterized using pressure sensitive paper. The effect of poor pressure uniformity is discussed, and the non‐uniformity corrected for use in a eutectic Au/Sn based wafer‐to‐wafer bond. Findings Several types of under solder metallization were also investigated, with Nb/Au seed metal providing the best overall result with good solder compression, liquid proof seal and minimal solder spill‐out. Solder compression versus pressure applied was studied to achieve an excellent gap control (2‐3 μm) between the bonded substrates. Originality/value This paper shows that characterization of applied pressure measured directly at the substrate is an important aspect in the development of high yielding bond processes.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".