Fabrication of Piezoresistive Sensors in Standard MEMS Foundry Processes
Bibliographic record
Abstract
A technique for fabrication of piezoresistive sensors in standard MEMS processes is introduced. A pair of beams from different structural layers are designed such that when one beam is under tension, the other one is under compression. By properly routing an electrical current through the structure, it is possible to measure the change in the resistance of beams as a result of applied stress. The proposed method does not require electrical isolation of piezoresistors from structural layers, and as confirmed by experiments, can be practically used for small deflections. Sample structures were fabricated in the MUMPs process and were employed to prove the validity of the design principle. Using the Maxwell-Mohr method, an analytical model is developed for the proposed structure and is verified by finite element simulations. Using modeling and experimental results, the piezoresistive coefficient of the top polysilicon layer in MUMPs process was calculated to be $11.5times10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-11</sup> nPa <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> . Having the proper structure, its model, and the piezoresistive coefficient of the material, it is now possible to design and optimize a wide variety of piezoresistive sensors, such as accelerometers and magnetic field sensors, in low-cost standard MEMS processes
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".