Application of a Plasma Arc Lamp for Thermal Processing of Semiconductor Wafers
Bibliographic record
Abstract
This paper describes the application of a vortex water wall high-pressure argon lamp for a semiconductor annealing process. These lamps have been designed to operate up to a 500-kW power level, have a continuous spectrum, similar to daylight, and have been used to characterize solar cells. Precise control of the radiated power generated by the lamps is required, which, in turn, requires an accurate electrothermooptical dynamic model of the lamp and an optothermal model of the wafer. This paper discusses general aspects regarding the modeling of the system consisted of the lamp and the wafer. The main contributions of the paper are the following: (1) a simplified means of relating the radiation exiting the lamp to the electrical power injected into the lamp, taking into account radiation from an isothermal core and absorption in the cold swirling argon gas, the water wall, and the quartz envelope; and (2) a model to describe energy exchange between the lamp and the wafer and experimental results to indicate the good agreement between the model and the actual apparatus. Two companion papers discuss the details of the arc model and the discrete-time control algorithms developed to model the wafer subsystem and the arc subsystem.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".