Photoluminescence from Er-doped Si-rich Si oxides deposited by magnetron sputtering in Ar or Ar+H2 plasmas
Bibliographic record
Abstract
The authors have studied photoluminescence (PL) from Er-doped Si-rich Si oxide (SRSO) films deposited by magnetron sputtering of an Er+Si+SiO2 composite target in Ar or Ar+H2 ambients. When the samples were annealed in N2, for the film grown in an Ar ambient, the PL annealing behaviors reveal that the emissions from the film are defect-related and that the Er3+ PL at 1.54μm is possibly triggered by a defect-mediated energy transfer process; while for the films grown in an Ar+H2 ambient, the emissions from the SRSO matrix are suppressed and the Er PL intensities increase significantly but differently dependent on the Ar:H2 ratios during sputtering. After annealing the samples in an Ar+5%H2 (FG) ambient, however, almost no Er PL was observed from the film grown in the Ar ambient, while the Er PL intensities of the films grown in the Ar+H2 ambient increase further compared to those annealed in N2. Fourier transform infrared spectroscopy shows that the absorption of the samples after FG annealing is weaker than after annealing in N2. The PL properties have also been compared to those of a sample grown by plasma enhanced chemical vapor deposition. The roles of hydrogen during sputtering and postdeposition annealing are discussed.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.003 |
| Science and technology studies | 0.001 | 0.002 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.002 | 0.001 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".