EVOLUTION OF MICROSTRUCTURE IN TI-TA BILAYER THIN FILMS ON POLYCRYSTALLINE-SI AND SI(001)
Bibliographic record
Abstract
Abstract We have studied the formation of titanium silicides in the presence of an ultra-thin layer of Ta, interposed between Ti and Si, using in situ X-ray diffraction (XRD), resistance measurements, elastic light scattering and exsitu transmission electron microscopy. On both poly-Si and Si(001) substrates the Ta thickness was varied from 0 to 1.5 nm while the Ti thickness was held constant at ∼27 nm. The time-resolved XRD shows that the volume fraction of the C40 and metal-rich silicide phases grows with increasing Ta layer thickness. Among the Ta thicknesses we examined, 0.3 nm is the most effective in lowering the C49–C54 transformation temperature. Ex situ texture analysis shows that the C54 disilicide film is predominantly (010) textured for the Ti/0.3 nm Ta sample on both poly-Si and Si(001). The final C54 texture is significantly different for Ta layers thinner or thicker than the optimal 0.3 nm. This suggests that the most effective thickness for lowering the C54 formation temperature could be related to the development of a strong (010) texture.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".