Optically Transparent Flexible IGZO TFTs Fabricated with a Selective Wet-Etch Process
Bibliographic record
Abstract
Given the relatively poor selectivity to common semiconductor etchants, IGZO (InGaZnO) thin film transistors (TFTs) are typically fabricated using lift-off processes to define the electrical contacts. However, the success of the emerging transition-metal oxide materials system for flexible electronics requires compatibility with conventional TFT fabrication processes. In this research, flexible IGZO TFTs having 85% optical transparency in the visible regime were fabricated on polyethylene napthalate (PEN) substrates using a selective wet etching process to eliminate the need for lift-off processing. The devices were processed directly onto the plastic platform at the maximum temperature of 150°C. The fabricated TFTs exhibited a field-effect mobility of ~12.5 cm2/V.sec, threshold voltage of ~5.0 V, and an Ion/Ioff ratio of <106. No current crowding behavior was observed for the TFTs at the low drain-source voltage (VD) regime. The highly selective etching process provides a means to fabricate IGZO based circuits with low processing complexity that will enable system-on-“plastic” integration of flexible transparent flexible displays.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".