Frequency response of curved bilayer microcantilevers with applications to surface stress measurement
Bibliographic record
Abstract
Bilayer microcantilevers are normally curved because of fabrication-induced stresses. When used in biological/chemical sensing applications, the absorption of target agents onto the functionalized surface of the microcantilever creates a surface stress that shifts its resonance frequency. Despite numerous efforts, the mechanisms of surface stress-induced shift in the resonance frequency of microcantilevers remain elusive. To address this problem, this work presents a detailed analysis of the frequency response of microcantilevers, with different width-to-thickness ratios and curvature levels, using classical lamination theory and the Rayleigh–Ritz method. Based on the results of this analysis, a new relationship between resonance frequency shift and curvature variation due to differential surface stress loading is established. By comparing the strain energies associated with the in-plane and out-of-plane displacements of the microcantilever at different curvature levels, a new implicit model for surface stress-induced resonance frequency shift in microcantilevers is presented. Verified against the results of experiments carried out on gold/polysilicon microcantilevers, the new model is expected to provide a better understanding of surface stress-microcantilever resonator interaction, which is critical to systematic optimization of resonance-based micro sensors.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".