Design and Modelling of a MEMS Capacitive Temperature Sensor With Linear Capacitance-Temperature Response
Bibliographic record
Abstract
A capacitive temperature sensor with separate thermal actuation and capacitive readout is introduced. A bi-layer plate with fixed-free boundary condition is used for the thermal actuation to change the gap between two parallel electrodes used for capacitance measurement. Different coefficients of thermal expansion (CTE) of the two layers in actuator cause out-of-plane deformations in the plate when the temperature changes. The proposed design has the capability to control the response of the sensor by increasing its sensitivity in a given temperature range. To obtain the desired characteristic C-T curve, the design utilizes asymmetric geometries. Different design parameters such as the size of the bi-layer plate and the sense electrodes are considered as design variables. ANSYS® FEM simulations are used to extract the C-T responses of different geometries. The results of the FEM simulations show that for a given fabrication process and material properties, the design can be modified to provide the highest sensitivity and linearity in the C-T response for a given temperature range. This temperature sensor can be used for remote and on-chip temperature measurement or temperature compensation.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".