A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime
Bibliographic record
Abstract
Besides the application of local lifetime control, proton implantations can be used to create deep donor profiles in crystalline silicon. At a certain annealing temperature, the maximum hydrogen-related donor (HD) concentration is limited to a few 1015 cm-3 in the end-of-range depth of the radiation damage profile. This behavior is explained with a passivation of the shallow donors due to an excess supply of hydrogen at high proton doses. The impact of hydrogen remaining in the substrate from prior processing steps is investigated. As a countermeasure to the over-decoration effect, a pre-annealing step at elevated temperatures is investigated. This procedure is fully applicable in a commercial manufacturing environment. Experimental results from spreading resistance measurements are shown that clearly show the beneficial effect of the pre-conditioning. DLTS results of pre-conditioned samples are reported, that show a dominant deep defect level that was previously assigned to be vacancy related.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".