Study of Chemical Structure and Removal of Positive-Tone Novolak Resist Having Various Prebake Temperature using Wet Ozone
Bibliographic record
Abstract
プリベーク（PB）温度の異なるノボラック系ポジ型レジスト（ノボラック樹脂+溶解抑制剤（PAC））の湿潤オゾンによる除去特性について，FT-IRおよびマイクロサンプリング質量分析法（μ-MS）による化学構造の変化，熱重量測定（Thermo Gravimetry Analyzer; TGA）による残存溶媒量の変化など種々の構造解析を行い評価した．PB温度を100–200˚Cまで変化させたレジスト膜は，湿潤オゾンによってすべて除去された．ただし，PB温度100–140˚Cではレジスト除去速度は変化せず，PB温度160˚C以上ではPB温度が高くなるほどレジスト除去速度が低下した．FT-IRスペクトルより，ノボラック系ポジ型レジストは160˚C近傍でPACからN2が脱離するが，ノボラック樹脂については変化がみられなかった．μ-MSの結果では，PB温度によってノボラック樹脂およびPACの分解温度や化学構造は変化しなかった．TGA測定により，レジスト膜中の残存溶媒はPB温度140˚Cと160˚Cとの間でほぼ完全に蒸発した．以上のことからPB温度を変えてもレジスト膜の化学構造の変化や熱架橋は起こらず，PB温度が160˚C以上になることで膜中の残存溶媒がほぼ完全に蒸発し，レジスト膜が収縮し硬化する．このため，PB温度160˚C以上で，レジスト除去速度が大きく減少した．
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".