Study of Chemical Structure and Removal of Positive-Tone Novolak Resist Having Various Prebake Temperature using Wet Ozone
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Bibliographic record
Abstract
プリベーク（PB）温度の異なるノボラック系ポジ型レジスト（ノボラック樹脂+溶解抑制剤（PAC））の湿潤オゾンによる除去特性について，FT-IRおよびマイクロサンプリング質量分析法（μ-MS）による化学構造の変化，熱重量測定（Thermo Gravimetry Analyzer; TGA）による残存溶媒量の変化など種々の構造解析を行い評価した．PB温度を100–200˚Cまで変化させたレジスト膜は，湿潤オゾンによってすべて除去された．ただし，PB温度100–140˚Cではレジスト除去速度は変化せず，PB温度160˚C以上ではPB温度が高くなるほどレジスト除去速度が低下した．FT-IRスペクトルより，ノボラック系ポジ型レジストは160˚C近傍でPACからN2が脱離するが，ノボラック樹脂については変化がみられなかった．μ-MSの結果では，PB温度によってノボラック樹脂およびPACの分解温度や化学構造は変化しなかった．TGA測定により，レジスト膜中の残存溶媒はPB温度140˚Cと160˚Cとの間でほぼ完全に蒸発した．以上のことからPB温度を変えてもレジスト膜の化学構造の変化や熱架橋は起こらず，PB温度が160˚C以上になることで膜中の残存溶媒がほぼ完全に蒸発し，レジスト膜が収縮し硬化する．このため，PB温度160˚C以上で，レジスト除去速度が大きく減少した．
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it