Sequential Plasma Activated Process for Silicon Direct Bonding
Why this work is in the frame
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Bibliographic record
Abstract
Sequential plasma activated bonding (SPAB) process consisting of oxygen reactive ion etching (RIE) and nitrogen microwave radical plasma was developed for silicon direct bonding at room temperature. A strong influence of plasma time and gas pressure on voids was found both in the SPAB and O2 RIE processes. Tensile strength and surface roughness are functions of oxygen RIE, nitrogen radical time and gas pressure. Improved tensile strength was achieved in the SPAB process. High resolution transmission electron microscope (HRTEM) observations showed a thicker silicon oxide interfacial layer from the SPAB process than that from the O2 RIE process. The increase in thickness of interfacial oxide layers in both processes after annealing at 600{degree sign}C for 2 h in air is attributed to the oxygen concentration of silicon bulk wafers. The SPAB process can be explained by the reaction between two metastable surfaces, which allows water removal from interface, resulting in covalent Si-O-Si bonding.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it