Fabrication of Lead-Free Piezoelectric (K, Na)NbO<sub>3</sub>Thin Film on Nickel-Based Electrodes
Bibliographic record
Abstract
It is desirable to replace noble metals used as electrode materials for piezoelectric thin film with base metals. A nickel-based layer is proposed as a bottom electrode for potassium (K) sodium (Na) niobate (NbO3) (KNN) piezoelectric thin film. Pure nickel is used as a bottom electrode under the KNN layer, and nickel silicide is used as an uncovered bottom electrode to gain access to the electrode placed under the KNN. The obtained results do not indicate the oxidation of the nickel-based bottom electrode after the deposition of KNN at 600 °C for 10 h in the presence of oxygen and/or after annealing the sample at 400 °C for an hour in air. The dielectric constant was determined to be 280 at 1 kHz. The remnant polarization was estimated to be 12.5 μC/cm2. The effective piezoelectric coefficient d33was estimated to be 37 pm/V at 100 kV/cm. The effective coefficient d31was evaluated by measuring the tip deflection of KNN unimorph cantilevers to be 17.2 pm/V. The relatively lower values of the piezoelectric properties of the fabricated KNN/Ni/Ti/SiO2/Si can be attributed to the crystal orientation of the KNN layer, which was preferentially oriented in the (110) direction.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".