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Record W2351531971

Improving efficiency of silicon nitride film deposition on glass

2009· article· en· W2351531971 on OpenAlexaff
Jiang Xin

Bibliographic record

VenueHarbin Gongcheng Daxue Xuebao/Journal of Harbin Engineering University · 2009
Typearticle
Languageen
FieldEngineering
TopicThin-Film Transistor Technologies
Canadian institutionsL'Alliance Boviteq
Fundersnot available
KeywordsSilicon nitrideMaterials sciencePlasma-enhanced chemical vapor depositionSilaneElectron cyclotron resonanceSubstrate (aquarium)Deposition (geology)Refractive indexThin filmChemical vapor depositionNitrideSilicon oxynitrideSiliconAnalytical Chemistry (journal)PlasmaLayer (electronics)OptoelectronicsComposite materialNanotechnologyChemistry
DOInot available

Abstract

fetched live from OpenAlex

In order to improve manufacturing efficiency for thin film solar cells on glass substrates,silicon nitride film was deposited by electron cyclotron resonance-plasma enhanced chemical vapor deposition (ECR-PECVD) at low temperature on a glass substrate.Pure nitrogen was used as the plasma gas,and silane (Ar diluted,5% SiH4) as the precursor gas.Results show that uniform silicon nitride film with low hydrogen content can be deposited at a high deposition rate (10.7 nm/min).The refractive index increased with rising substrate temperature and increased microwave power.The film has good optical properties (refractive index around 2.0) and surface quality (average roughness 1.45 nm) when the deposition parameters are T=350℃ and p=650 W.This allows a uniform,even,and high quality SiN film to be prepared at higher deposition speeds.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.278
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0010.001
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0010.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.004
GPT teacher head0.156
Teacher spread0.152 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations0
Published2009
Admission routes1
Has abstractyes

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