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Record W2461306664 · doi:10.1109/jmems.2016.2576924

Acid-Free Electrochemical Chromium Etch and Release of Nanoscale Gold Films

2016· article· en· W2461306664 on OpenAlexafffund
Christoph Sielmann, Valerie Siller, Konrad Walus, Boris Stoeber

Bibliographic record

VenueJournal of Microelectromechanical Systems · 2016
Typearticle
Languageen
FieldChemical Engineering
TopicAnalytical Chemistry and Sensors
Canadian institutionsUniversity of British Columbia
FundersNatural Sciences and Engineering Research Council of CanadaCanada Research ChairsCanada Foundation for Innovation
KeywordsChromiumEtching (microfabrication)Materials scienceSodium hydroxideLayer (electronics)Substrate (aquarium)ElectrodeElectrochemistryInorganic chemistryHydroxideChemical engineeringTitaniumCoatingMetallurgyNanotechnologyChemistry

Abstract

fetched live from OpenAlex

We describe a method for releasing coated and uncoated 100-nm gold films from a 5-nm chromium-coated glass substrate. The method is rapid at room temperature within a nontoxic solution of sodium phosphate or sodium hydroxide. Etching processes using hydroxide successfully etch the chromium layer without affecting a ZnO coating layer deposited on the gold film. Etching using sodium phosphate at neutral pH causes some surface damage to the ZnO surface while leaving the bulk of the film intact. Other anions tested include nitrates and chlorides, both demonstrating poor etching selectivity, damaging the gold as well as the chromium layers. A copper counter electrode is used to collect the chromium from the solution, minimizing chromium persistence in the etching solution and any contamination of the ZnO surface. This single step acid-free process can be applied to a variety of materials and structures formed on gold, where insulating materials and many oxides do not require any special protection from the etching solution. An uncoated or polyimide coated 2 cm × 1.5 cm film can be released in under 1 h, while ZnO-coated films require up to 7 h to to release films 1 cm × 1 cm in size.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0010.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0010.001

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.006
GPT teacher head0.199
Teacher spread0.193 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations1
Published2016
Admission routes2
Has abstractyes

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