Interfacial Contact Effects in Top Gated Zinc Oxide Thin Film Transistors Grown by Atomic Layer Deposition
Bibliographic record
Abstract
Contact effects at the source/drain (S/D) electrodes in thin film transistors (TFTs) based on zinc oxide (ZnO) utilizing the top gate, bottom contact geometry are investigated using electrical and material studies. Low temperature atomic layer deposition (ALD) is employed to directly grow the ZnO active layer on Au, Ru, and TiW bottom electrodes. TFT performance varies significantly depending on the S/D metallization scheme. Au contacts are seen to uniquely promote the growth of a highly n-doped ZnO channel that degrades the TFT's output impedance and controllability. On the other hand, TiW contacts suffer from poor carrier injection because of Schottky barrier formation. The best overall performance is demonstrated by Ru/ZnO TFTs based on their excellent switching capabilities alongside a moderately high mobility. From X-ray photoelectron spectroscopy measurements, the superior performance of Ru is the consequence of an oxidation-free interface that inhibits the adsorption of hydroxide surface dopants. Thus, the surface chemistry of the metal contact plays a large role on the ZnO growth and metal/ZnO interface energetics.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".