Thermal Decomposition of Copper Iminopyrrolidinate Atomic Layer Deposition (ALD) Precursors on Silicon Oxide Surfaces
Bibliographic record
Abstract
The thermal chemistry of Cu(I)- N - sec -butyl-iminopyrrolidinate on silicon oxide films was characterized by using temperature-programmed desorption (TPD) and X-ray photoelectron spectroscopy (XPS). Three temperature regimes were identified after adsorption at 100 K: (1) molecular desorption at 240 K; (2) protonation of some of the ligands and formation of the corresponding iminopyrrolidine at 300 K; and (3) fragmentation of the remaining ligands to produce H 2, HCN, and butene, which occurs concurrently with the reduction of the copper ions. Most of the carbon and nitrogen atoms are removed from the surface after the third step, and copper desorbs above 900 K. Adsorption of the copper complex at room temperature leads to a partial early reduction of the metal and to the extended production of sec -butyl-iminopyrrolidine in two broad peaks around 330 and 460 K. Self-limiting adsorption, as required for atomic layer deposition (ALD) processes, is seen up to 500 K, but by 550 K continuous copper deposition takes place. In general, the chemistry of this copper ALD precursor is milder and cleaner on silicon oxide than on metals.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".