Ultra Low-k Dielectric Films with Ultra Small Pores Using Poragens Chemically Bonded to Siloxane Resin
Why this work is in the frame
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Bibliographic record
Abstract
Burning Out Sacrificial Spacers or BOSS technology has been developed to fabricate porous ultra low-k (ULK) dielectrics having ultra small pores. The technology utilizes BOSS resin, which has a curable resin backbone and poragen groups chemically linked to the resin backbone. The chemical bond between the resin and poragen prevents the phase separation during curing, allowing the molecular level control of the pore size and distribution. Porous ultra low-k thin films were fabricated from the resin using conventional spin coating and furnace cure. A proto-type BOSS material, a SiH siloxane resin having isophytol poragen groups, led to films having a dielctric constant of 1.8, breakdown voltage of 4 MV/cm, and an average pore size of 2.2 nm by PALS. The film mechanical strength was identified as the key challenge for this technology, or any porous ULK technology.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it