Ultra Low-k Dielectric Films with Ultra Small Pores Using Poragens Chemically Bonded to Siloxane Resin
Bibliographic record
Abstract
Burning Out Sacrificial Spacers or BOSS technology has been developed to fabricate porous ultra low-k (ULK) dielectrics having ultra small pores. The technology utilizes BOSS resin, which has a curable resin backbone and poragen groups chemically linked to the resin backbone. The chemical bond between the resin and poragen prevents the phase separation during curing, allowing the molecular level control of the pore size and distribution. Porous ultra low-k thin films were fabricated from the resin using conventional spin coating and furnace cure. A proto-type BOSS material, a SiH siloxane resin having isophytol poragen groups, led to films having a dielctric constant of 1.8, breakdown voltage of 4 MV/cm, and an average pore size of 2.2 nm by PALS. The film mechanical strength was identified as the key challenge for this technology, or any porous ULK technology.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".