MétaCan
Menu
Back to cohort
Record W2488472067 · doi:10.1117/3.601520.ch4

Modeling and Thin Film Effects

2009· book-chapter· en· W2488472067 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueSPIE eBooks · 2009
Typebook-chapter
Languageen
FieldEngineering
TopicAdvancements in Photolithography Techniques
Canadian institutionsAdvanced Micro Devices (Canada)
Fundersnot available
KeywordsResistBridge (graph theory)LithographyWaferTruckComputer scienceComputationAperture (computer memory)WorkstationNumerical apertureMechanical engineeringPoint (geometry)OpticsEngineeringMaterials scienceNanotechnologyAlgorithmElectrical engineeringPhysicsAutomotive engineeringGeometryMathematics

Abstract

fetched live from OpenAlex

Imagine if the only way to determine whether bridges were designed with sufficient strength to support the weight of fully loaded trucks was to build each bridge in its desired location according to an engineer's best guess, drive trucks across to see if the bridge collapsed, and redesign the bridge if it failed. This approach to bridge design is clearly impractical. What has made it possible to build large bridges are the mathematical theories of beams and plates enabling civil engineers to predict whether their designs will work or not, prior to construction. Similarly, advancements in lithography technology have been facilitated by the availability of predictive theoretical models and tools. Today, imaging performance can be simulated on personal computers and engineering workstations in order to determine what the design parameters should be for lenses that cost millions of dollars to fabricate. Lithography simulations involve several key steps: (1) The calculation of optical images. These are intensities I(x,y) in the plane of the wafer, that are applicable for low-numerical-aperture optics, or they can be fully three dimensional intensities I(x,y,z), that may be needed for accurate simulation of exposures using high-numerical-aperture lenses. (2) Prediction of the photochemical reactions resulting from the exposure of photoresist to the previously calculated light distributions. This provides a calculated state-of-exposure at every point (x,y,z) of interest in the resist film. (3) Computation of changes in chemical distributions within the resist as a consequence of diffusion that occurs during post-exposure bakes. (4) Calculation of resist profiles following resist development. Models for all of these key steps are discussed in this chapter.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Theoretical or conceptual · Consensus signal: none
GenreCandidate signal: Other · Consensus signal: Other
Teacher disagreement score0.505
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.009
GPT teacher head0.222
Teacher spread0.212 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it