In-Situ Rare Earth Doping of Silicon-Based Nanostructures By Plasma Enhanced Chemical Vapour Deposition
Bibliographic record
Abstract
In order for Si-based materials to be used in solid-state lighting (SSL) schemes it is necessary to have precise control of the optical emission from these materials. This can be accomplished through the use of rare earth dopants such as Ce, Tb, and Eu to obtain blue, green, and red emissions, respectively. After a brief review of the latest developments in the field, this talk will focus on several in-situ doping approaches to achieving very high, optically active concentrations of the rare earths. The methodologies include electron cyclotron resonance plasma enhanced chemical vapour deposition (ECR-PECVD), inductively coupled plasma (ICP) CVD as low thermal budget processes for film deposition, reactive sputtering, as well as the use of a recently installed Circular High Vacuum Magnetron Sputtering source attached to the ECR-PECVD tool. We will describe the salient features of the deposition systems and correlate important process parameters with the observed luminescence. Finally, we will discuss some of the challenges in developing electrically driven lighting cells suitable for SSL and in particular, for the development of widely tuneable Si-based light sources. This work has been supported by the Natural Sciences and Engineering Research Council (NSERC) under its Discovery Grants Program.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".