Effects of aging on nanoscale planar metal-insulator-metal tunnel junctions
Bibliographic record
Abstract
The authors use the nanodamascene fabrication process to realize planar metal-insulator-metal tunnel junctions with Ti and TiN as electrodes and TiO2 (plasma oxidation) or Al2O3 (atomic layer deposition) as insulators. The nanodamascene process allows the fabrication of junction areas as small as 20 × 10 nm2 in the current implementation, with room for further scaling. The authors use thorough electrical transport measurements together with a corresponding in-house developed simulation tool to study the aging and find solutions to stabilize junctions. The simulation tool calculates junction current using the Wentzel–Kramers–Brillouin approximation for the tunneling probability with hyperbolic junction shape taking image force into account. The tool is used for two purposes: (1) to extract key parameters of the junctions and (2) to construct a more complete understanding of the changes in current–voltage characteristics as the devices age. The study of a device aged 100 days shows an increase of up to 0.6 nm in oxide thickness through air exposition which reduces the current level by almost an order of magnitude. A similar study on passivated devices with different oxides shows improvements in stability with less than 2% change over 48 days. The presented platform combining versatile fabrication with corresponding modeling is useful to better understand the impact of the different parameters on the junction behavior and develop more robust oxide tunnel junctions.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".