Nitroxide‐mediated polymerization of adamantyl‐functional methacrylates for 193 nm photoresists
Bibliographic record
Abstract
Three different methacrylic monomers (γ‐butyrolactone methacrylate (GBLMA), 3‐hydroxyl‐1‐adamantyl methacrylate (HAMA), and 2‐methyl‐2‐adamantyl methacrylate (MAMA)), that are most often terpolymerized for 193 nm photoresists, were studied individually by nitroxide mediated polymerization (NMP) with succinimidyl ester terminated BlocBuilder (NHS‐BlocBuilder) using a small fraction ∼ 0.05 mol/mol (5 mol%) in the initial mixture of 2,3,4,5,6 pentafluorostyrene (PFS) controlling co‐monomer. The copolymerizations were done in 0.35 g/g (35 wt%) dioxane solution and were studied as functions of temperature (75 versus 90 °C) and added free SG1 nitroxide (none versus SG1:NHS‐BlocBuilder molar ratio ≈ 0.15) with the objective of minimizing the dispersity ( ). MAMA/PFS copolymerizations were not strongly influenced by temperature or addition of free nitroxide, with relatively linear number average molecular weight versus conversion plots and = 1.28–1.55. Further, MAMA/PFS polymerization kinetics was notably slower compared to GBLMA or HAMA copolymerizations with PFS. For GBLMA/PFS and HAMA/PFS copolymerizations, was reduced at the lower temperature of 75 °C but added SG1 did not play a strong role. For GBLMA/PFS, was reduced from 1.70–1.71 at 90 °C to 1.42–1.50 at 75 °C and for HAMA/PFS, was reduced from 1.36–1.47 at 90 °C to 1.22–1.31 at 75 °C.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".