Performance enhancement of an air-coupled multiple moving membrane capacitive micromachined ultrasonic transducer using an optimized middle plate configuration
Bibliographic record
Abstract
A multiple moving membrane capacitive micromachined ultrasonic transducer has been developed. This transducer cell structure includes a second flexible plate suspended between the transducer top plate and the fixed bottom electrode. The added plate influences the transducer top plate deflection map and, therefore, the transducer properties. Three series of individual air-coupled, dual deflectable plate transducers and two 1×27 element transducer arrays were fabricated using multiuser microelectromechanical systems (MEMS) processes (MUMPs). Each set of transducers included devices with middle plate radii from 22% to 65% of the corresponding transducer top plate radius. The effect of the transducer middle plate configuration has been investigated. Electrical, optical, and acoustic characterizations were conducted and the results were compared with the simulation findings. It was found that the transducer top plate amplitude of vibration is significantly enhanced with a wider middle deflectable plate. The electrical and optical measurement results are shown to be in good agreement with simulation results. The acoustic measurement results indicated a 37% increase in the amplitude of transmitted signal by the 1-MHz air-couple transducer when its middle plate radius was increased by 35%.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".