Design, fabrication and characterization of a high performance MEMS accelerometer
Bibliographic record
Abstract
High performance accelerometers have wide variety of applications in inertial navigation, seismic imaging, and conditional health monitoring. This paper reports mechanical design, fabrication, and characterization of an in-plane MEMS accelerometer. The sensor has been designed in such a way to meet both the high sensitivity and the wide bandwidth requirements in one single device. The MEMS sensor, which is an interdigitated capacitive accelerometer, is fabricated from a 100 um thick SOI wafer using deep reactive ion etching (DRIE) process. Theoretical results were confirmed by experimental measurements. Sensor has a resonance frequency at 2.3 KHz. Voltage sensitivity of the device is 11.8mV/g. The mechanical-thermal noise of the device is 193ng/rtHz. These characteristics make the device a promising candidate for applications where both the high sensitivity and the wide bandwidth are required.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".