MEMS transducers low-cost fabrication using SU-8 in a sacrificial layer-free process
Bibliographic record
Abstract
Abstract We report novel low-cost and rapid fabrication technologies for the fabrication of movable polymer-based MEMS structures, electrically actuated. Using SU-8 photoresist as structural material, both ordinary and functionalized by conductive fillers (nano-Ag particles and carbon nanotubes), the novel fabrication methods provide simple processes, without the use of any sacrificial layer, for achieving suspended structures (beams and membranes) through either binary or gray-scale photolithography. Experimental validation has demonstrated high yields (over 99% for one of the process flows) in achieving electrostatically actuated microstructures with resonant frequencies in the 0.5–0.8 MHz range, with a stable dynamic behavior tested for a period longer than three months. The technology also confirms that ‘doping’ SU-8 with conductive fillers can preserve its photo-patterning capabilities, while modifying other physical properties (electrical conductivity). As the patterning of SU-8 films can take place on either rigid or flexible substrates, this low-cost technology promises a wide range of applications.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".