SOIMUMPs micromirror scanner and its application in laser line generator
Bibliographic record
Abstract
A SOIMUMPs 1-D rotation micromirror is presented. The micromirror is driven by electrostatic vertical comb-drive actuators to work at resonant mode to scan a laser beam. The residual stress in the metal film coated on the SOI device layer is used to generate vertical offset in the comb-drive actuators with the combs located far from the rotation axis to increase the torque. A concave lens is designed to put after the micromirror to amplify the laser beam scanning angle, as well as to compensate for the curvature of the micromirror. A micromirror-based scanning system is used to build a laser line generator with a continuously adjustable fan angle, which solves the limitation of a fixed fan angle in conventional laser line generators. Prototypes of the micromirror and the laser line generator are fabricated and measured. A driving circuit that can generate a high-voltage square wave driving signal with adjustable amplitude and frequency is designed. All the parts are integrated in a 44 mm×88 mm×44 mm box and powered with a single 5-V power supply. The optical scanning angle under 100 V with or without the concave lens is 27 deg and 12 deg, respectively, at a resonant frequency of 900 Hz.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".