Design and Sensitivity Improvement of CMOS-MEMS Scanning Microwave Microscopes
Bibliographic record
Abstract
In this paper, we present the performance and imaging results of an integrated single-chip CMOS-microelectromechanical systems (MEMS) scanning microwave microscope (SMM). A systematic analysis for sensitivity improvement is described in detail. We first explain why it is important to have high sensitivity for this type of microscope and then propose a systematic method to analyze and design the entire structure for better sensitivity. For this, accurate lumped models are derived for each section of the system and comparisons are made between different designs. Furthermore, a new concept based on the quality factor of the individual sections is described to give the designer a tool to improve the sensitivity of individual sections without the need to simulate or model the entire system. A high-sensitivity measurement system is also explained. Finally some measurement results are presented. While the analysis presented in this paper is for CMOS-MEMS SMM, it is applicable to any type of SMM.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".