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Record W2751822787

A single-chip scanning probe microscope array

2017· article· en· W2751822787 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueIEEE Conference Proceedings · 2017
Typearticle
Languageen
FieldPhysics and Astronomy
TopicForce Microscopy Techniques and Applications
Canadian institutionsUniversity of Waterloo
Fundersnot available
KeywordsCantileverChipFabricationMetrologyMicroscopeMicroelectromechanical systemsMaterials scienceAtomic force microscopyScanning probe microscopyNanotechnologyInstrumentation (computer programming)Characterization (materials science)CMOSOptoelectronicsOpticsComputer scienceEngineeringElectrical engineeringPhysics
DOInot available

Abstract

fetched live from OpenAlex

This paper reports the first single-chip atomic force microscope (sc-AFM) array that simultaneously acquires multiple images of a sample. The design, fabrication in a CMOS-MEMS process, and characterization of a 4×1 array is presented in this paper. Four AFM cantilevers share an electrothermal (ET) lateral stage while each AFM cantilever is independently driven, sensed, and controlled. The reported instrument has been used to obtain simultaneous 10μm × 10μm images without the use of external scanners or position sensing hardware. This sc-AFM array spawns a new class of metrology instrumentation with the potential for unprecedented imaging throughput: parallel scanning probe microscopy (pSPM).

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.230
Threshold uncertainty score0.935

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0010.000
Scholarly communication0.0010.000
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.035
GPT teacher head0.296
Teacher spread0.261 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it