Post-Fabrication Melting Procedure With I-Shaped Beams for Stiction-Free Release of 2-D Surface-Micromachined Micromirrors Equipped With Repulsive-Force Actuators
Bibliographic record
Abstract
This paper presents a post-fabrication melting procedure with an I-shaped beam design to solve the problem of stiction in surface-micromachined 2-D micromirrors equipped with repulsive-force actuators. This design adds extra I-shaped beams to the free-standing mirror plate to increase its stiffness about one thousandfold and allow it to survive the wet release process. Then, those beams are melted and broken electrically on-chip after fabrication to restore the original stiffness. With the aid of repulsive force, the I-shaped beam design can use a low current for melting. A high current was used in the previously presented T-shaped fusible tether beam design, but it causes splattering and residue. The I-shaped beam design has been successfully applied to a repulsive-force 2D micromirror that is integrated with head-up display and stiction is eliminated. The modeling, simulation, and prototyping processes are presented, and the ways in which it can be used in a general surface-micromachined free-standing structure to eliminate stiction are discussed.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".