Post-Fabrication Melting Procedure With I-Shaped Beams for Stiction-Free Release of 2-D Surface-Micromachined Micromirrors Equipped With Repulsive-Force Actuators
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Bibliographic record
Abstract
This paper presents a post-fabrication melting procedure with an I-shaped beam design to solve the problem of stiction in surface-micromachined 2-D micromirrors equipped with repulsive-force actuators. This design adds extra I-shaped beams to the free-standing mirror plate to increase its stiffness about one thousandfold and allow it to survive the wet release process. Then, those beams are melted and broken electrically on-chip after fabrication to restore the original stiffness. With the aid of repulsive force, the I-shaped beam design can use a low current for melting. A high current was used in the previously presented T-shaped fusible tether beam design, but it causes splattering and residue. The I-shaped beam design has been successfully applied to a repulsive-force 2D micromirror that is integrated with head-up display and stiction is eliminated. The modeling, simulation, and prototyping processes are presented, and the ways in which it can be used in a general surface-micromachined free-standing structure to eliminate stiction are discussed.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it