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Record W2884721995 · doi:10.1038/s41378-018-0022-5

Fabrication and testing of polymer-based capacitive micromachined ultrasound transducers for medical imaging

2018· article· en· W2884721995 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueMicrosystems & Nanoengineering · 2018
Typearticle
Languageen
FieldMedicine
TopicUltrasound Imaging and Elastography
Canadian institutionsUniversity of British Columbia
FundersNatural Sciences and Engineering Research Council of CanadaCMC Microsystems
KeywordsCapacitive micromachined ultrasonic transducersFabricationMaterials scienceTransducerCapacitive sensingUltrasonic sensorOptoelectronicsPiezoelectricityAcousticsElectrical engineeringEngineering

Abstract

fetched live from OpenAlex

Abstract The ultrasonic transducer industry is dominated by piezoelectric materials. As an emerging alternative, capacitive micromachined ultrasound transducers (CMUTs) offer wider bandwidth, better integration with electronics, and ease of fabricating large arrays. CMUTs have a sealed cavity between a fixed electrode and a suspended metalized membrane. Manufacturing cost and sensitivity are limiting factors in current CMUTs that depend on the fabrication equipment and, especially, on the materials used. For widespread use of CMUTs, a much lower fabrication cost that uses inexpensive materials, which maintain or improve upon existing sensitivity, is needed. Herein, a new fabrication process is described for polymer-based CMUTs (polyCMUTs) using the photopolymer SU-8 and Omnicoat. The first ultrasound B-mode image of a wire phantom created with a 64-element linear array using synthetic aperture beamforming techniques is presented. A 12 V AC signal superimposed on a 10 V DC signal was used on the transmission side, and only a bias-tee, with no amplifiers, was used on the receiving side. The low operational voltage and high sensitivity of this device can be partially attributed to a pre-biasing condition on the membrane. By using a novel sacrificial layer combined with a top electrode embedded inside the membrane, we demonstrated that SU-8 can be used to manufacture CMUTs inexpensively. Moreover, the fabrication used relatively simple equipment, and the number of fabrication steps was reduced compared to traditional CMUT fabrication. This new fabrication process has the potential to increase the use of CMUTs in the ultrasound market, including the market for wearable transducers.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.147
Threshold uncertainty score0.841

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.007
GPT teacher head0.235
Teacher spread0.228 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it