ZnO Schottky Nanodiodes Processed From Plasma-Enhanced Atomic Layer Deposition at Near Room Temperature
Bibliographic record
Abstract
In this paper, we report a low thermal budget manufacturing method to produce highly rectifying Schottky diodes with ultrathin ZnO films grown at near room temperature by plasma-enhanced atomic layer deposition. A bottom Schottky electrode with Pt and a top ohmic electrode with Al/Au stacks were used for metallization. The resultant diodes demonstrated high rectifying ratios on the order of 106, relatively low ideal factor n values of 1.36 ±0.05, effective Schottky barrier height B values of 0.77 ± 0.01 eV, and high breakdown fields of 1.67 MV/cm extrapolated from the current-voltage (I-V) characteristics at room temperature. These specifications are among the best-reported performance of Schottky diodes with ZnO thin films in nanoscale thickness. The interface at the Schottky contacts was investigated and revealed a lateral nonuniform distribution of interface defect states. A modified Richardson plot was used to deduce a mean barrier height (Φ <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">B0</sub> ) of 1.25 ± 0.1 eV and an apparent Richardson constantc (A**) of 11.64 A/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> /K <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . In addition, I-V characteristics of the diodes were observed to improve with aging. This newly developed, low thermal budget technique of ZnO Schottky nanodiodes is attractive for hybrid circuit systems and polymer electronics with integration constraints.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".