Reactively Magnetron Sputter-Deposited Ti (C,N) Nanocomposite Thin Films: Composition and Thermal Stability
Bibliographic record
Abstract
Titanium carbonitride thin films were grown by reactive magnetron sputtering deposition of titanium carbide target in Ar/N2 gas mixture on p-type silicon (100) substrates. With the increase of sputtering power up to 125W, the deposition rate and films thickness reached a maximum of 14nm/min and 430nm, respectively. A thick film of about 2200nm could be deposited for 120 min at the optimum deposition pressure of 20mTorr. Cathode current decreased from about 290mA to reach a value of about 235mA as the N2 flow percentage increased from 0 to 100%. X-ray diffraction analyses of the deposited films confirmed the formation of titanium carbide and carbonitride layers as the nitrogen gas concentrations in the process gas were increased. SEM image of the deposited titanium carbonitride thin film for 5 min deposition time showed that the film started to grow as tiny particles of size as low as about 140nm, which in later stage coalesced together to form bigger grains and finally a continuous film. The deposited film shows good thermal stability upon annealing in air and in vacuum at 700oC for 2 hours.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".