In-Plane High-Sensitivity Capacitive Accelerometer in a 3-D CMOS-Compatible Surface Micromachining Process
Bibliographic record
Abstract
This paper proposes a novel design for a 3-D, high-sensitivity, single-axis lateral capacitive accelerometer. The accelerometer utilizes the entire area of the sensor for both sensing and the proof mass, which mitigates the tradeoffs often needed in conventional 2-D designs. The accelerometer structure is optimized to target the highest possible performance. Innovative Z-shaped supporting beams are introduced to limit the vertical displacement within the transducer’s submicron gap. The design was fabricated in a novel 3-D complementary metal–oxide–semiconductor-compatible surface micromachining process. This process allows the use of non-conductive materials with attractive mechanical properties to build capacitive microelectromechanical system (MEMS) devices. Polyimide is used as a core structural layer which is combined with other materials such as silicon nitride or silicon carbide to build the final sensors. The photolithography steps are limited to four, and the number of materials used is also limited to four, in order to keep the process feasible. The overall thermal budget is 300 °C, which enables above-IC MEMS integration. While the used materials provide good results, this process is not limited to them, and other materials can be used, if needed. The fabricated accelerometer measures <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$500 \times 500 \,\,\mu \text{m}^{2}$ </tex-math></inline-formula> and achieves 58 fF/g sensitivity in a ±4 g range in an open-loop system, yielding a competitive sensitivity per unit area. [2018-0125]
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".