Fabrication of Long Range Surface Plasmon Polariton Biosensors Incorporating a Channel Etch Stop Layer and Wafer Bonded Cover
Bibliographic record
Abstract
This thesis presents the micro-fabrication process of a Long Range Surface Plasmon Polariton (LRSPP) biosensor device. The fabrication process was modified in two aspects which include adding a channel etch stop layer to improve the accuracy and uniformity of channels in the device and replacing the photoresist etching mask by an Al etching mask to avoid the thermal cracking. The optical performance of the fabricated chips shows that the biosensor has a 5.03dB/mm attenuation loss and has a 0.10dB response for a monolayer of BSA on Au waveguides. CYTOP bonding process was introduced in the fabrication of the device that incorporates a glass cover. A glass wafer was successfully bonded to a silicon wafer by CYTOP bonding process to seal the channels, which ensured an isolated testing environment for the biochemical fluid.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".