A New Temperature Transducer for Local Temperature Compensation for Piezoresistive 3-D Stress Sensors
Bibliographic record
Abstract
In this paper, a new temperature transducer using full-circular n-type piezoresistor over (111) silicon plane is proposed as an accurate solution for local temperature compensation for piezoresistive three-dimensional (3-D) stress sensors. Analytical study, in this paper, showed that the proposed n-type full-circular piezoresisor over (111) has near-zero response under 3-D state of stress. As an experimental verification, a test device with n-type piezoresistive stress sensing elements oriented over (111) plane at 0° and 90° to crystallographic direction [1̅10] was microfabricated to test the capability of the proposed temperature compensator. The test device was subjected to a uniaxial load up to 50 MPa using a loading rig with four-point bending fixture. The testing was performed over a temperature range of 0-50 °C. The results showed that the proposed temperature transducer has a linear response to temperature excitation. The fabricated transducer is capable of accurately capturing the local temperature changes with maximum absolute error of ±0.8 °C. This compensation system is advantageous for piezoresistive stress/strain sensors, since the temperature transducer has the same thermal environment with the stress/strain-sensing rosette. Moreover, this technique does not require additional circuitry on the sensing device itself.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".