Capabilities and Limits to Form High Aspect-Ratio Microstructures by Molding of Borosilicate Glass
Why this work is in the frame
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Bibliographic record
Abstract
This paper presents an experimental study of capabilities to fabricate high aspect-ratio microstructures in glass. The fabrication was done by molding borosilicate glass in deep silicon trenches created by deep reactive ion etching in silicon and releasing the structures by potassium hydroxide (KOH) and Xenon difluoride (XeF <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ) etching of the Si mold. Subsequent over-etching of the glass can also be used to increase the aspect ratio of the glass structures. By using this molding method, glass structures have been successfully fabricated achieving an aspect ratio of 42:1, a height of 212 μm , and vertical sidewall angle up to 89.7°. We also investigated the effect of molding parameters (heat treatment time, temperature, and pressure) on the process capabilities and limitations for defect free structures. This work demonstrates the capabilities to fabricate high aspect-ratio glass structures that cannot be achieved by conventional etching techniques to date, opening new perspectives for the use of glass in MEMS and microfluidics.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it