Crystal quality of SiGe films fabricated by the condensation technique and characterized by medium energy ion scattering
Bibliographic record
Abstract
Abstract Highly strained SiGe-on-insulator (SGOI) channels are desired for p-type transistor performance enhancement. A fine characterization of the crystal quality as a function of depth of such films would be of great interest as the SiGe crystal quality influences its electrical properties. The crystal quality of SGOI films fabricated by the condensation technique is measured by the Medium Energy Ion Scattering technique using the channeling effect. Indeed, the presence of structural defects such as dislocations is associated with atoms displaced from their normal lattice sites that contribute as a consequence to the scattering yield in channeling conditions. This paper compares the crystal quality of low Ge content and high Ge content SGOI films fabricated by condensation. It is shown that the SiGe crystal is degraded in the top part of the film, both before and after condensation, and that the presence of Ge, even at low fraction, at the interface with the buried oxide, induces crystal damage in the immediate vicinity of the interface. We finally highlight that, except close to the interfaces with oxide films, SGOI films fabricated by condensation feature high crystal qualities up to 57% Ge concentration and 2% compressive strain.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".