Large aperture surface-micromachined rotating micromirror with the majority of dimples removed
Bibliographic record
Abstract
Abstract This paper presents a surface-micromachined repulsive-force driven 1D rotating micromirror with a large aperture (1 mm). Two rotating beams are located on the bottom side of the mirror plate, while two repulsive-force actuators are connected to two middle sides to push the mirror plate up for out-of-plane rotation. Thus, no complex self-assembly structure is required to raise the mirror plate for rotation as most conventional surface-micromachined rotating micromirrors do. In order to increase the yield rate for the large aperture micromirror and avoid dimples used for preventing stiction during fabrication, six post-fabrication melted supporting beams are used along the circumference to increase the stiffness in fabrication, which are electrically melted and broken after fabrication to restore the initial stiffness. Only 12 dimples in the center of mirror plate are used for preventing operational stiction. The mirror’s reflectivity is increased to 25% from 20% after removing the majority of dimples. 36 prototypes are fabricated and tested and none of them suffer from stiction problem. The 6.3° optical rotation is achieved with a settling time of 26 ms.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".