Novel method to improve stroke of electrostatically actuated MEMS micromirror
Bibliographic record
Abstract
In this paper, an electrostatically actuated MEMS micromirror with enhanced stroke is presented. Unlike traditional MEMS micromirror, the proposed micromirror achieves a large out-of-plane stroke through employing a larger air gap for the micromirror surface to move as well as eliminating the pull-in instability. This novel micromirror has a central reflective micromirror surface of 400 μm by 400 μm, an L-shaped arm that holds the micromirror to the anchor on all side and 3 fixed bottom electrodes beneath each L-shaped arms. The lateral electrostatic forces on the upper L-shaped arm are equal in magnitude but opposite in direction and they counteract to neutralize out each other. The electrostatic force produced on the top L-shaped arm is larger than on the bottom. Therefore, the net electrostatic force points in the upward direction. As a result, the upper plate of the micromirror moves upwards. COMSOL Multiphysics is used to simulate and design the device in order to optimize the stroke of the micromirror for a lower input voltage. The mirror is fabricated using PolyMUMPs fabrication technique where an air cavity of 2.75 μm was achieved by combining the two available sacrificial layers. In this proposed design, an out-of-plane stroke of 2.43 μm is achieved at a 110 V DC bias voltage.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.001 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".