Fabrication of Long Range Surface Plasmon Polariton Biosensors incorporating Optical Waveguides and Encapsulated Microfluidic Channels via Wafer Bonding"
Bibliographic record
Abstract
A microfabricated structure incorporating optical waveguides and closed microfluidic channels is an essential component in realizing a practical long range surface plasmon polariton (LRSPP) biosensor.This has been achieved through advances in fabrication processes to realize reliable optical waveguides, and by development of a reliable wafer bonding process to create closed fluid channels.An existing process for fabrication of gold waveguides was modified by introducing ultra-shallow trenches to recess waveguides and present a planar surface for bonding.An improved fluidic channel etching process was characterized and successfully employed, yielding very smooth channel surfaces free from curtaining and grass issues.Optical performance of the complete bonded chips was demonstrated and verified using a cutback measurement method, producing an attenuation loss of 4.92 dB/mm.An alternative hot embossing process for formation of microfluidic channels on TOPAS substrate was investigated.Embossing die was produced on 4-inch silicon wafer using deep reactive ion etching (DRIE) to create 29 µm raised channels, and the die was subsequently used to transfer the channel structure to the TOPAS material.to work in the area of microfabrication in general, and in particular, optical LRSPP biosensor project.It was a fascinating introduction to the field, and an excellent opportunity to learn from their extensive knowledge and experience.It was a great pleasure to work under their supervision and directions.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".