Characterization of Europium Doped Silicon Oxide, Silicon Oxynitride, and Silicon Nitride Films Prepared By Integrated Ecr-PECVD and Magnetron Sputtering
Bibliographic record
Abstract
The compatibility of Si-based light sources with mainstream metal-oxide semiconductor technology has become very interesting over the past decades due to their potential in integrated optoelectronics circuits of monolithic Si [1]. A very promising approach to improve the light emission from silicon-based materials is doping silicon with rare earth elements, and numerous research is involved in this field [1]. However, there are only a few works on europium (Eu) doped silicon-based matrix. In this work, Eu doped silicon oxide, silicon oxynitride, and silicon nitride thin films were deposited on P (100) Si substrates using integrated electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) and magnetron sputtering. Silane (SiH 4 ), oxygen (O 2 ), and Nitrogen(N 2 ) gases were used as precursors and solid Eu as the sputtering target. The integrated ECR-PECVD and sputtering system allows tunable and highly consistent Eu doping concentration, better control of the layer stoichiometry along with less hydrogen incorporation in the deposited film compared to conventional CVD systems [2]. Several thin films were investigated using room temperature photoluminescence (PL) and X-ray diffraction (XRD). A detailed investigation of the effect of annealing on the PL was performed. The annealing temperature was varied from 500 O C to 1200 O C in nitrogen and a mixture of nitrogen and hydrogen atmospheres. It was observed that the intensity of the PL spectra increased with increasing annealing temperature. Besides, the hydrogen passivation effect has been studied in this work, which shows that hydrogen passivation increases the intensity of the peak. Based on the XRD measurements, we have found that the amorphous silicon oxide structure changes to a crystalline structure by adding nitrogen in the film. Interestingly silicon oxynitride and silicon nitride films do not show any luminescence at room temperature. The influence of the precursors' gases in the atomic percentage of the thin films was analyzed by Rutherford Backscattering spectrometry (RBS). In addition to it, the thickness and the index of refraction were characterized by variable angle spectroscopic ellipsometry (VASE). Reference: 1. Lin, Z., Huang, R., Wang, H., Wang, Y., Zhang, Y., Guo, Y., ... & Li, H. (2017). Dense nanosized europium silicate clusters induced light emission enhancement in Eu-doped silicon oxycarbide films. Journal of Alloys and Compounds , 694 , 946-951. 2. Miller, J. W., Khatami, Z., Wojcik, J., Bradley, J. D. B., & Mascher, P. (2018). Integrated ECR-PECVD and magnetron sputtering system for rare-earth-doped Si-based materials. Surface and Coatings Technology , 336 , 99-105.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".