Control of germanium diffusion using low quantities of co-implanted silicon isotopes
Bibliographic record
Abstract
The thermal diffusion of Ge implanted into SiO2 films growth on a Si substrate has been studied by nuclear analyses and μ-Raman spectroscopy with and without the presence of co-implanted 30Si and 29Si barriers, each located from both sides of the Ge implanted distribution. Combination of Rutherford backscattering spectroscopy and Resonant nuclear reaction analysis shows that, under thermal activation at 1100°C, implanted Ge diffuses differently toward the sample surface and the SiO2/Si interface due to the occurrence of Ge outgassing effects, as well as the non-homogenous distributions of the implanted ion species and the defects they have generated inside SiO2. A maximum local atom concentration of co-implanted silicon as low as ∼1.6 at. % is found to completely block the germanium diffusion in both directions, leading to the formation of Ge nanocrystals and Si/Ge aggregates evidenced by μ-Raman spectroscopy. In addition to highlighting the role of Si excess on the Ge trapping mechanism, such a result makes the nominal silicon oxide stoichiometry and composition two crucial parameters to stabilize Ge during high temperature annealing, which explains the strong discrepancies reported for the Ge thermal diffusion coefficient in the literature.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".