Stoichiometry controlled homogeneous ternary oxide growth in showerhead atomic layer deposition reactor and application for ZrxHf1−xO2
Bibliographic record
Abstract
Atomic layer deposition (ALD) processes for binary oxide (AOy or BOz) growth consist of a sequential introduction of metal precursor (precursor-A or precursor-B) and oxidant-O such that the respective surface reactions are self-limiting with respect to precursor and oxidant exposure times (tA or tB and tO). This approach has been further extended for ternary oxide AδB1−δOλ deposition with (i) super-cycle ALD method (where each super-cycle comprises of m-cycles of AOy ALD followed by n-cycles of BOz ALD), (ii) precursor co-dosing method (where precursor-A and precursor-B are simultaneously pulsed followed by an oxidant-O pulse), and (iii) 3-step ALD (where precursor-A, precursor-B, and oxidant-O are sequentially pulsed). In this Letter, we present a subsaturation pulse initiated 3-step process with ApBO… pulsing sequence for ternary oxide AδB1−δOλ deposition in showerhead ALD reactors. Here, the pulse-Ap reaction step is controlled in the subsaturation regime, while both pulse-B and pulse-O reaction steps are allowed to reach saturation as in a typical ALD. From kinetic simulations, we show that the chemisorbed –Ache surface coverage [Ache] could be controlled below its saturation limit [Ache]sat with exposure time tA and precursor impingement rate kAin in the pulse-Ap reaction step. Furthermore, with precursor transport model, we show that kAin could be varied with a better control using ampoule temperature TampA and precursor-A carrier gas flow FiA together than using TampA alone. As example, we report ZrpHfO… pulsed deposition of ZrxHf1−xO2 ternary oxide samples ZHO1–ZHO4 in a showerhead ALD reactor, and from quantitative XPS analysis, we show that the Zr-fraction (x) could be varied in the range of 0.094 ≤ x ≤ 0.159 with Zr-carrier gas flow FArZr.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".