Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors
Bibliographic record
Abstract
Abstract Micro electromechanical system (MEMS) based optical phased array (OPA) technology generally demands narrow and tightly spaced suspended microstructures with high-aspect-ratio in the lateral dimensions. This paper presents an one dimensional OPA system which is fabricated using the standard PolyMUMPs process, leading to a low-cost, simplified and commercially accessible surface micromachining technique for the OPA technology. The proposed OPA device utilizes an array of metal-coated silicon micromirrors with high-aspect-ratio structures which act as optical phase shifters. Each micromirror along the array is individually actuated by an electrostatic parallel plate micro-actuator made of a micro-cantilever beam positioned above a fixed electrode. The field of view obtained by the device is measured as 4.76° which is comparable to those by the previous MEMS based OPA devices fabricated using custom-run and complex surface micromachining processes. The OPA device has a response time of 6.5 µ s and an out of plane actuation stroke of 0.16 µ m at a bias voltage of 55 V. The magnitude of the out of plane displacement by the phase shifters is equal to one-quarter of the laser wavelength (650 nm) used which leads to the desired optical phase shift of π radian.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".