Post-fabrication resonance trimming of Si<sub>3</sub>N<sub>4</sub> photonic circuits via localized thermal annealing of a sputter-deposited SiO<sub>2</sub> cladding
Bibliographic record
Abstract
We report a resonance trimming technique, applicable to waveguides employing an SiO2 cladding. The SiO2 is deposited by a room temperature sputtering process. Resonance shifts of micro-ring resonators of 4.4 nm were achieved with furnace annealing, whereas a resonance shift of 1.4 nm was achieved using integrated micro-heaters. For our device layout, with 30 μm ring separation, the thermal cross-talk is negligible, and isolated trimming of each micro-ring is achieved. Three, single-channel ring filters on the same substrate were aligned to the same wavelength within a 20 pm precision. The stability of trimmed micro-rings was assessed following extended storage in atmospheric ambient. For a ring shifted by 4.4 nm using furnace annealing, relaxation of 540 pm is observed, while for a ring shifted by 1.4 nm using integrated heaters, the relaxation is 270 pm.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".