Constrained shrinking of nanoimprinted pre-stressed polymer films to achieve programmable, high-resolution, miniaturized nanopatterns
Bibliographic record
Abstract
Nanoimprint lithography is an emerging technology to form patterns and features in the nanoscale. Production of nanoscale patterns is challenging particularly in the sub-50 nm range. Pre-stressed polymer films with embedded microscale pattern can be miniaturized by shrinking induced due to thermal stress release. However, when pre-stressed films are thermally nanoimprinted with sub-micron features and shruken, they lose all the topographical features due to material recovery. Here we report a new approach that prevents recovery and allows retention of shrunken patterns even at the scale of <50 nm. We have discovered that when the shrinking process is mechanically constrained in one direction, the thermal treatment only relieves the stress in the orthogonal direction leading to a uniaxial shrinkage in that direction while preserving the topographical features. A second step, with the constraint in the orthogonal direction leads to biaxial shrinkage and preservation of all of the topographical features. This new technique can produce well defined and high resolution nanostructures at dimensions below 50 nm. The process is programmable and the thermal treatment can be tuned to shrink features to various dimension below the original imprint which we use to produce tunable and gradient plasmonic structures.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".